M48 Metallurgical Microscope Semiconductor Inspection
The Fein Optic M48 metallurgical brightfield microscope is an ideal microscope for semiconductor inspection. This critical dimension metrology microscope is available with brightfield / darkfield reflected light. The stage provides room for viewing wafers, semiconductors, or slice substrates on your choice of a 6″ or 8″ mechanical stage. The Fein Optic M48 microscope provides brightfield, darkfield, polarization and DIC contrast microscopy. A variety of objective lenses are available.
| Optical System | Infinity Color Corrected Achromatic Optical System |
| Observation | Brightfield, Darkfield, Polarization, DIC |
| Viewing Head | 30° Inclined trinocular viewing head, erect image. Splitting ration: 100:0 or 0:100. Interpupillary distance adjustable from 50mm – 76mm. |
| Eyepieces | High eyepoint WF PL10x / 25mm, with adjustable diopter. Accepts 26mm diameter reticle. |
| High eyepoint WF PL10x / 26.5mm, with adjustable diopter. Accepts 26mm diameter reticle. | |
| Objectives | Infinity Corrected LWD Brightfield Plan Achromat 5x, 10x, 20x, 50x, 100x. |
| Infinity Corrected High Resolution Brightfield Semi Apo 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected LWD BD Plan Achromat Objectives 5x, 10x, 20x, 50x, 100x | |
| Infinity Corrected High Resolution BD Plan Achromat 5x, 10x, 20x, 50x, 100x. | |
| Nosepiece | Brightfield / Darkfield quintuple nosepiece with DIC slot. |
| Brightfield / Darkfield sextuple nosepiece with DIC slot. | |
| Brightfield sextuple nosepiece with DIC slot. | |
| Brightfield septuple nosepiece with DIC slot. | |
| Focus Adjustment | Low position coaxial focus mechanism, coarse range: 33mm, fine precision: 0.001mm. Upper limit and tension adjustment. |
| Power | Power supply 100~240V wide voltage system. |
| Stage | 6″ three layer mechanical stage with low position coaxial adjustment, size 445mm x 240mm. Moving range: 158mm x 158mm. Clutch handle for quick movement and glass plate for reflected use. |
| 8″ three layer mechanical stage with low position coaxial adjustment, size 525mm x 330mm. Moving range: 210mm x 210mm. Clutch handle for quick movement and glass plate for reflected use. | |
| Illumination | 12v / 100w Halogen BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit. |
| Polarization | Analyzer with rotatable polarizer. |
| C-Mount Adapter | 0.5x, 0.65x, 1x C-Mount Adapters. |