M46 Metallurgical Microscope
The Fein Optic M46 metallurgical brightfield microscope is an ideal microscope for wafer inspection. This critical dimension metrology microscope is available with reflected ligth only or with both reflected and transmitted light. The 6″ stage provides room for viewing wafers, semiconductors, or slice substrates. The Fein Optic M46 microscope provides brightfield, darkfield, polarization and DIC contrast microscopy. A variety of objective lenses are available.
| Optical System | Infinity Color Corrected Achromatic Optical System |
| Observation | M46-TRF: Brightfield, Darkfield, Polarization, DIC, Transmitted Illumination |
| M46-RF: Brightfield, Darkfield, Polarization, DIC | |
| Viewing Head | 30° Inclined trinocular viewing head, erect image. Splitting ration: 100:0 or 0:100. Interpupillary distance adjustable from 50mm – 76mm. |
| Eyepieces | High eyepoint WF PL10x / 22mm, with reticle retaining ring for 26mm diameter reticle. |
| Objectives | Infinity Corrected LWD Brightfield Plan Achromat 5x, 10x, 20x, 50x, 100x. |
| Infinity Corrected High Resolution Brightfield Semi Apo 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected LWD BD Plan Achromat Objectives 5x, 10x, 20x, 50x, 100x | |
| Infinity Corrected High Resolution BD Plan Achromat 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected BD Plan Achromat 5x, 10x, 20x, 50x, 100x. | |
| Nosepiece | Quintuple brightfield / darkfield nosepiece with DIC slot. |
| Focus Adjustment | Low position coaxial focus mechanism, coarse range: 33mm, fine precision: 0.001mm. Upper limit and tension adjustment. |
| Power | Power supply 90~240V wide voltage system. |
| Stage | M46-RF: 6″ three layer mechanical stage with low position coaxial adjustment. Moving range: 158mm x 158mm. Clutch handle for quick movement and glass plate for reflected use. |
| M46-TRF: 6″ three layer mechanical stage with low position coaxial adjustment. Moving range: 100mm x 100mm. Clutch handle for quick movement and glass plate for reflected/transmitted use. | |
| Illumination | M46-RF: 12v / 100w halogen BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit. |
| M46-TRF: 12v / 100w halogen BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit. Transmitted 5W LED illumination, brightness adjustable. | |
| Condenser | M46-RF: No condenser included. |
| M46-TRF: NA 0.5x condenser with iris diaphragm. | |
| Polarization | Analyzer with rotatable polarizer. |
| C-Mount Adapter | 0.5x C-Mount Adapter |